This is the first textbook to provide a comprehensive overview of the field, beginning with micromachining approaches and then covering all major categories of transduction. The book takes a practical approach to the subject and studies key design issues by examining the fabrication of different devices.
This is the first textbook to provide a comprehensive overview of the field, beginning with micromachining approaches and then covering all major categories of transduction. The book takes a practical approach to the subject...
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